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Dop Course Outline
OS7086 Introductions of Nano and Micro Fabrication Last Revised: 2024-10-17
Course Objectives To equip the clean-room users with basic knowledge on the fabrication of semiconductor devices

Prerequisite

Textbook “Semiconductor Manufacturing Technology by Michael Quirk & Julian Serda, Pearson, ISBN: 978-986-154-117-4“

Topical Outline Material Properties; Doping and Diffusion; Photolithography; Oxidation and Thin Films Deposition;Annealing; Etching.




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