Academics
Dop Course Outline
OS7086 Introductions of Nano and Micro Fabrication
Last Revised: 2023-12-21
Course Objectives
To equip the clean-room users with basic knowledge on the fabrication of semiconductor devices.
Prerequisite
Textbook "Semiconductor Manufacturing Technology by Michael Quirk & Julian Serda, Pearson, ISBN: 978-986-154-117-4"
Topical Outline Material Properties; Doping and Diffusion; Photolithography; Oxidation and Thin Films Deposition;Annealing; Etching.
Prerequisite
Textbook "Semiconductor Manufacturing Technology by Michael Quirk & Julian Serda, Pearson, ISBN: 978-986-154-117-4"
Topical Outline Material Properties; Doping and Diffusion; Photolithography; Oxidation and Thin Films Deposition;Annealing; Etching.
